Michael Putty, Ph.D

Michael W. Putty received the BSEE, MSEE, Ph.D. EE degrees in electrical engineering from the University of Michigan, Ann Arbor in 1983, 1989, and 1995 respectively.  He is currently LEO Lecturer III at the University of Michigan Dearborn.  Dr. Putty spent over 25 years in the MEMS semiconductor and electronics industries having worked at Integrated Sensing Systems, Delphi Research Labs, and General Motors Research Labs developing MEMS sensor and electronic components.  While at General Motors Research Labs he developed a micromachined ring gyroscope that is still being manufactured in high volume today.  Before that he worked at Eaton Corporation developing microprocessor control systems for heavy duty vehicles.  Dr. Putty has expertise in the areas of MEMS, semiconductor devices, analog design, digital design, digital signal processing, and controls.

BSEE University of Michigan Ann Arbor, 1983

MSEE University of Michigan Ann Arbor, 1989

Ph.D. EE University of Michigan Ann Arbor, 1995

1. M.W. Putty, Shih-Chia Chang, R.T. Howe, A.L. Robinson, K.D. Wise, "One-Port Active Polysilicon Resonant   Microstructures," Proceedings, IEEE Workshop on Microelectromechanical Systems, Salt Lake City, Utah, Feb. 20-22, 1989, pp. 60-65
2. M.W. Putty, Shih-Chia Chang, R.T. Howe, A.L. Robinson, K.D. Wise, "Process Integration for Active Polysilicon Resonant Microstructures," Sensors and Actuators, 20, 1989, pp. 143-151
3. Shih-Chia Chang, M.W. Putty, D.B. Hicks, C.H. Li, R.T. Howe, "Resonant-Bridge Two-Axis Microaccelerometer," Proceedings, 5'th International Conference on Solid-State Sensors and Actuators, Montreux, Switzerland, June 1989
4. Shih-Chia Chang, M.W. Putty, D.B. Hicks, C.H. Li, R.T. Howe, "Resonant-Bridge Two-Axis Microaccelerometer," Sensors and Actuators, 20, 1989
5. W.H. Juan, S.W. Pang, A. Selvakumar, M.W. Putty, K. Najafi, "Using Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for Fabrication of Electroplated Microstructures," Tech Digest, Solid State Sensors and Actuators Workshop, Hilton Head, S.C., June 1994, pp. 82-85
6. D.B. Hicks, Shih-Chia Chang, M.W. Putty, D.S. Eddy, "Piezoelectrically Activated Resonant Microbridge Accelerometer," Tech Digest, Solid State Sensors and Actuators Workshop, Hilton Head, S.C., June 1994, pp. 225-228
7. M.W. Putty, K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Invited Paper, Tech , Digest, Solid State Sensors and Actuators Workshop, Hilton Head, S.C., June 1994, pp. 213-230
8. Shih-Chia Chang, M.W. Putty, "Electroforming for Microsensors," Invited Paper, Proceedings, The 1994 International Conference on Electronic Materials, Hsinchu, Taiwan, 1994
9. Qian Shi, Shih-Chia Chang, M.W. Putty, " Characterization of electroformed nickel microstructures," SPIE Proceedings, Micromachining and Microfabrication Process Technology, Vol. 2639, 1995, pp. 191-199
10. M.W. Putty, Shih-Chia Chang, " Mechanical properties of boron-doped single-crystal silicon microstructures," SPIE Proceedings, Micromachining and Microfabrication Process Technology V, Vol. 3874, August 1999, pp. 196-204
11. D. Sparks, G. Queen, R. Weston, G. Woodward, M. W. Putty, L Jordan, S Zarabadi, K Jayakar, " Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder," J. Micromech. Microeng, 11 (6), November 2001, pp. 630-634
12. Shih-Chia Chang, M.W. Putty, " Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope," SPIEProceedings, MEMS/MOEMS Components and Their Applications II, Vol. 5717, January 2005, pp. 142-154
13. J. V. Mantese, A. L. Micheli, N. W. Schubring, M.W. Putty, M. P. Thompson, S. Chang, J. R. Troxell, L. Oberdier, J. Celinska , C. Paz de Araujo, " Enhanced pyroelectric sensitivity using ferroelectric active mode detection," Applied Physics Letter90s, 113503, March 2007